LASERTEC CORPORATION
Patent Owner
Stats
- 27 US PATENTS IN FORCE
- 0 US APPLICATIONS PENDING
- Dec 14, 2017 most recent publication
Details
- 27 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 511 Total Citation Count
- Aug 09, 1996 Earliest Filing
- 6 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
- No Recent Publications to Display
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9786057 Inspection apparatus, coordinate detection apparatus, coordinate detection method, and wavefront aberration correction methodAug 27, 15Oct 10, 17[H04N, G06T, G01N, G03F, G06K]
9719859 Interferometer and phase shift amount measuring apparatus with diffraction gratings to produce two diffraction beamsDec 10, 14Aug 01, 17[G01J, G01N, G01B, G03F]
9696568 Light source apparatus and inspection apparatusMay 12, 16Jul 04, 17[G01J, G01N, G02B, H01S, G02F]
9638739 Defect coordinates measurement device, defect coordinates measurement method, mask manufacturing method, and reference maskMar 08, 13May 02, 17[G01R, G03F]
9551672 Defect classifying method and optical inspection apparatus for silicon carbide substrateDec 18, 14Jan 24, 17[G01N]
9240041 Defect inspection device, defect inspection method, and defect inspection programMay 28, 13Jan 19, 16[G06T, G06K]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2013/0234,597 PLASMA SHIELD DEVICE AND PLASMA SOURCE APPARATUSAbandonedMar 07, 13Sep 12, 13[H01J, H05H]
2011/0134,944 EFFICIENT PULSE LASER LIGHT GENERATION AND DEVICES USING THE SAMEAbandonedDec 08, 09Jun 09, 11[H01S]
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